Product Description
Product Description
GWSP Oil free Scroll Vacuum Pump
Working principle:
GWSP oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly,and exhaust valve assembly.Two spiral cylinders, 1 offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of different sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.
Basic informations:
1) Model: GWSP1000 Oil free scroll vacuum pump
2) Ultimate vacuum pressure: 1 Pa/0.01 mbar (abs.)
3) Max suction capacity: 50Hz-16.6L/s 60Hz-20.0L/s
Safety Precautions:
The GWSP series oil free scroll vacuum pumps are suitable for clean processes only.
Do not pump toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles.GEOWELL will not perform maintenance work on pumps which have used special gases or other hazardous substances.
Be sure the inlet gas temperature must be lower than 122 °F.
Technical Specifications
| Model | GWSP40 | GWSP75 | GWSP150 | GWSP300 | GWSP600 | GWSP1000 | ||
| Pumping Speed | 50Hz | l/s | 0.5 | 1.0 | 2.0 | 4.3 | 8.7 | 16.6 |
| m3/h | 1.8 | 3.6 | 7.2 | 15.5 | 31.3 | 59.8 | ||
| cfm | 1.1 | 2.1 | 4.3 | 9.3 | 18.7 | 35.8 | ||
| 60Hz | l/s | 0.6 | 1.2 | 2.4 | 5.1 | 10.4 | 20.0 | |
| m3/h | 2.2 | 4.3 | 8.6 | 18.3 | 37.4 | 71.6 | ||
| cfm | 1.3 | 2.5 | 5.1 | 10.9 | 22.3 | 42.8 | ||
| Ultimate Pressure | Torr | ≤1.1*10-1 | ≤6.0*10-2 | ≤4.5*10-2 | ≤1.9*10-2 | ≤7.5*10-3 | ≤7.5*10-3 | |
| psi | ≤2.2*10-3 | ≤1.2*10-3 | ≤9.0*10-4 | ≤3.8*10-4 | ≤1.5*10-4 | ≤1.5*10-4 | ||
| Pa | ≤15 | ≤8 | ≤6 | ≤2.6 | ≤1 | ≤1 | ||
| mbar | ≤1.5*10-1 | ≤8.0*10-2 | ≤6.0*10-2 | ≤2.6*10-2 | ≤1.0*10-2 | ≤1.0*10-2 | ||
| Noise Level | dB(A) | ≤54 | ≤57 | ≤57 | ≤60 | ≤61 | ≤65 | |
| Leakage | mbar·l/s | 1*10-7 | ||||||
| Max. Inlet/Exhaust Pressure | MPa | 0.1 / 0.13 | ||||||
| Ambient Operation Temp. | ºF | 41~104 | ||||||
| Motor 1 phase | Power | kW | 0.25 | 0.55 | 0.55 | 0.55 | 0.75 | -- |
| Voltage | V | 110~115 (60Hz),200~230 (50Hz) | -- | |||||
| Speed | rpm | 1425(50Hz),1725(60Hz) | -- | |||||
| Plug | North America, Europe, UK/Ireland, India | -- | ||||||
| Motor 3 phase | Power | kW | -- | 0.55 | 0.55 | 0.55 | 0.75 | 1.5 |
| Voltage | V | -- | 200~230 or 380~415 (50Hz),200~230 or 460 (60Hz) | |||||
| Speed | rpm | -- | 1425 (50Hz),1725 (60Hz) | |||||
| Inlet/Exhaust Flange | KF25/KF16 | KF40/KF16 | KF40/KF16*2 | |||||
| Dimensions | 1 phase | mm | 326*212*253 | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | -- |
| 3 phase | mm | -- | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | 576*450*402 | |
| Net Weight | 1 phase | kg | 15 | 21 | 22 | 29 | 36 | -- |
| 3 phase | kg | -- | 20 | 21 | 28 | 31 | 54 | |
| Cooling Type | Air cooled | |||||||
| Others | With air flush | |||||||
Features & Benefits
No oil clean vacuum.
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup.
Pumping speed covers 3~60 m3 /h, limited vacuum level 1~8 Pa
Suitable for all type of power supply around the world.
110/220/380/460V, 50/60Hz for choose
Low vibration, low noise.
57~65 dB(A), smooth operation
High efficiency, ease of maintenance.
No water cooled, no oil lubricated, no daily maintenance
Quality Control
CMM inspection system assures
fixed tolarance on dimension&shape
Pump Testing
Applications
Semiconductor industry.stry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry.
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry.
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing.
Vacuum gas substitution.
Vacuum equipment.
Oil free ultrahigh vacuum unit.
Oil free vacuum unit.
Related Products
GWT40 Foreline Filter
Performance: Filter out the dust particles contained in the intake gas.
Application: Vacuum coating, food and drug processing, ceramic and glass manufacturing, vacuum CHINAMFG and vacuum packaging systems.
GWS16 Exhaust Silencer
Performance: Reduce exhaust noise from oil-free vacuum systems.
Application: Installation of oil free scroll vacuum pumps requires a quiet vacuum system.
GWMMK1000 Major Maintenance Kit
Performance: Prolong the service life of the product.
Application: For the major maintenance of oil free scroll vacuum pump GWSP1000.
GWTSK1000 Tip Seal Kit
Performance: Prolong the service life of the product.
Application: For the scheduled maintenance of oil free scroll vacuum pump GWSP1000.
Company Profile
GEOWELL VACUUM CO.,LTD. is a HI-TECH enterprise in China dedicating in manufacturing, research and development, marketing of oil free scroll vacuum pumps and vacuum compressors since 2002. GEOWELL has been providing users and partners with premium quality products that are efficient and dependable, GEOWELL believe the integration of high performance and high reliability product and service will bring the highest value to both our customers and ourselves.
FAQ
Q: How long can I get the feedback after we sent the inquiry?
A: We will reply you within 12 hours in working day.
Q: Are you direct manufacturer?
A: Yes, we are direct manufacturer with factory and international department; we manufacture and sell all our products by ourselves.
Q: When can you delivery the product to us?
A: Since we are a factory with large warehouse, we have abundant products in store, so we can delivery within 7 days after get your deposit.
Q: Can I add logo to the products?
A: Of course, but we usually have quantity requirement. You can contact with us for details.
Q: How to guarantee the quality and after sales service of your products?
A: We conduct strict detection during production from raw material come in to product delivering shipment. Every product must go through 4 steps inspection from casting, machining, assembling, and performance testing within our factory before shipment, also intact packaging test are insured.
Q: What is your warranty term?
A: There is a 12 months warranty for our export products from the date of shipment. If warranty has run out, our customer should pay for the replacement part.
Q: Is the sample available?
A: Yes, usually we send our samples by Fedex, DHL, TNT, UPS, EMS, SF, Depon, it will take around 3 to 4 days for our customer receive them, but customer will charge all cost related to the samples, such as sample cost and air freight. We will refund our customer the sample cost after receiving the order.
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| After-sales Service: | Yes |
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| Warranty: | 1 Year |
| Oil or Not: | Oil Free |
| Customization: |
Available
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| Shipping Cost:
Estimated freight per unit. |
about shipping cost and estimated delivery time. |
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| Payment Method: |
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Initial Payment Full Payment |
| Currency: | US$ |
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| Return&refunds: | You can apply for a refund up to 30 days after receipt of the products. |
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Can scroll vacuum pumps be used in semiconductor manufacturing and research?
Yes, scroll vacuum pumps can be used in semiconductor manufacturing and research. Here's a detailed explanation:
Scroll vacuum pumps are widely utilized in various applications within the semiconductor industry, including both manufacturing processes and research activities. These pumps offer several advantages that make them suitable for semiconductor-related applications:
1. Clean and Oil-Free Operation:
Scroll vacuum pumps are available in oil-free versions, making them well-suited for semiconductor manufacturing and research environments that require a high level of cleanliness. Oil-free operation eliminates the risk of oil contamination, which is crucial in preventing particles or residues that could adversely affect semiconductor device fabrication or research experiments.
2. High Reliability and Uptime:
Scroll vacuum pumps are known for their reliable performance and minimal maintenance requirements. This is particularly important in semiconductor manufacturing, where continuous operation and high uptime are critical for maximizing productivity. The robust design and minimal wear parts of scroll pumps contribute to their long-term reliability and reduced downtime.
3. Low Vibration and Noise:
Scroll vacuum pumps operate with low vibration levels, which is advantageous in semiconductor manufacturing and research settings. Excessive vibrations can disrupt delicate semiconductor fabrication processes or interfere with sensitive research measurements. Additionally, scroll pumps are designed to operate quietly, contributing to a more comfortable and productive working environment.
4. Good Pumping Speed and Ultimate Vacuum:
Scroll vacuum pumps offer efficient pumping speeds, enabling rapid evacuation of process chambers or research apparatus. They can achieve high vacuum levels, which are necessary for various semiconductor manufacturing and research applications, such as thin film deposition, plasma etching, or surface analysis techniques.
5. Compact and Space-Saving:
Scroll vacuum pumps have a compact design and a smaller footprint compared to some other types of vacuum pumps. This is beneficial in semiconductor manufacturing facilities or research laboratories where space is often limited. The compact size of scroll pumps allows for easier integration into existing systems or setups.
6. Compatibility with Semiconductor Processes:
Scroll vacuum pumps are compatible with a wide range of semiconductor manufacturing processes, including vacuum deposition, etching, ion implantation, and thermal processing. They can handle various gases, vapors, and byproducts encountered in these processes, contributing to their versatility.
It is important to consult the manufacturer's specifications and guidelines to ensure that the specific scroll vacuum pump model is suitable for the semiconductor manufacturing or research requirements. Manufacturers can provide information on the pump's performance characteristics, materials compatibility, and any additional features or considerations specific to semiconductor applications.
By utilizing scroll vacuum pumps in semiconductor manufacturing and research, companies and researchers can benefit from their clean operation, reliability, high vacuum performance, and compatibility with a wide range of processes. These pumps play a vital role in enabling the production of high-quality semiconductor devices and supporting cutting-edge research in the semiconductor field.
What are the maintenance requirements for scroll vacuum pumps, and are they user-friendly?
Scroll vacuum pumps have relatively low maintenance requirements and are generally considered user-friendly. Here's a detailed explanation:
1. Maintenance Requirements:
Scroll vacuum pumps require regular maintenance to ensure optimal performance and longevity. The specific maintenance tasks may vary depending on the pump model and manufacturer's recommendations. However, the common maintenance requirements for scroll vacuum pumps include:
a. Filter Cleaning/Replacement: Scroll vacuum pumps often incorporate inlet filters to prevent debris and particulates from entering the pump. These filters may need periodic cleaning or replacement to maintain proper airflow and prevent clogging.
b. Oil Inspection/Change (If Applicable): Some scroll vacuum pumps may require oil lubrication for bearing or sealing purposes. In such cases, regular oil inspection and oil change may be necessary to ensure proper lubrication and prevent contamination.
c. Seal Inspection/Replacement: Scroll vacuum pumps utilize seals to maintain the pressure difference between the inlet and outlet. Over time, these seals may wear out and require inspection or replacement to prevent leaks and maintain pump efficiency.
d. Overall Inspection and Cleaning: Regular visual inspections are recommended to check for any signs of wear, damage, or buildup of contaminants. Cleaning the pump surfaces and removing any accumulated debris or dust can help maintain optimal performance.
2. User-Friendly Nature:
Scroll vacuum pumps are generally considered user-friendly due to the following reasons:
a. Easy Installation: Scroll vacuum pumps are compact and lightweight, making them easy to install and integrate into vacuum systems. They often come with user manuals or documentation that provide step-by-step instructions for installation.
b. Simple Operation: Scroll vacuum pumps have a straightforward operating principle with minimal moving parts. They typically require no adjustments or tuning during operation, making them easy to use for both novice and experienced users.
c. Minimal Maintenance: Compared to some other types of vacuum pumps, scroll vacuum pumps have relatively low maintenance requirements. The maintenance tasks are typically simple and can be performed without specialized tools or extensive technical knowledge.
d. Safety Features: Scroll vacuum pumps often incorporate safety features such as over-temperature protection or automatic shutdown mechanisms to prevent damage or accidents. These features enhance user safety and contribute to their user-friendly nature.
Overall, scroll vacuum pumps have manageable maintenance requirements and are considered user-friendly due to their ease of installation, simple operation, minimal maintenance needs, and incorporation of safety features. Regular adherence to the manufacturer's maintenance guidelines ensures optimal performance and extends the lifespan of the pump.
How does the scroll design contribute to the reliability of these pumps?
The scroll design of vacuum pumps plays a significant role in enhancing their reliability. Here's an explanation of how the scroll design contributes to the reliability of these pumps:
1. Sealed System:
The scroll design features two interleaved spiral scrolls, one fixed and one orbiting. The interaction between these scrolls creates a series of crescent-shaped chambers. As the orbiting scroll moves, these chambers decrease in size, compressing and expelling gases. The tightly sealed system of the scroll design ensures minimal leakage, preventing the entry of contaminants and maintaining a consistent vacuum level. This sealed system enhances the reliability of scroll vacuum pumps by minimizing the risk of performance degradation and ensuring continuous and efficient operation.
2. Oil-Free Operation:
One of the key advantages of scroll vacuum pumps is their oil-free operation. Unlike other types of pumps that rely on oil lubrication, scroll pumps utilize a dry mechanism. The scroll design eliminates the need for oil lubrication by using non-contacting, self-lubricating materials such as PTFE (polytetrafluoroethylene) or carbon. This eliminates the risk of oil contamination in the pumped gases or the vacuum chamber. The absence of oil also reduces maintenance requirements and enhances the reliability of the pumps by eliminating the potential for oil-related issues, such as oil degradation, leaks, or mechanical failures.
3. Minimal Moving Parts:
The scroll design features a relatively simple construction with minimal moving parts. Compared to other types of pumps, scroll vacuum pumps have fewer components that can wear out or malfunction. This reduces the likelihood of mechanical failures and improves the overall reliability of the pumps. The simplicity of the scroll design also contributes to ease of maintenance and servicing, further enhancing their reliability and uptime.
4. Low Vibration and Noise Levels:
The scroll design of vacuum pumps results in smooth and quiet operation. The absence of reciprocating pistons or vanes, which are common in other pump designs, reduces vibration levels. This lower vibration minimizes the stress on pump components, reducing wear and tear and improving the overall reliability. Additionally, the low noise levels of scroll pumps make them suitable for applications that require a quiet working environment, such as laboratories or medical facilities.
5. Contamination Resistance:
The scroll design of vacuum pumps offers inherent contamination resistance. The absence of oil lubrication eliminates the risk of oil carryover or oil-related contamination. Additionally, the sealed system and non-contacting scroll surfaces reduce the chances of particulate contamination or wear debris generation. This contamination resistance contributes to the long-term reliability of the pumps by minimizing the potential for performance degradation or damage to sensitive components.
In summary, the scroll design of vacuum pumps enhances their reliability through a sealed system, oil-free operation, minimal moving parts, low vibration and noise levels, and contamination resistance. These factors make scroll vacuum pumps a reliable choice for various industrial applications.
editor by Dream 2024-05-16