Product Description
Product Description
GWSP Oil free Scroll Vacuum Pump
Working principle:
GWSP oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly,and exhaust valve assembly.Two spiral cylinders, 1 offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of different sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.
Basic informations:
1) Model: GWSP600 Oil free scroll vacuum pump
2) Ultimate vacuum pressure: 1 Pa/0.01 mbar (abs.)
3) Max suction capacity: 50Hz-8.7L/s 60Hz-10.4L/s
Safety Precautions:
The GWSP series oil free scroll vacuum pumps are suitable for clean processes only.
Do not pump toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles.GEOWELL will not perform maintenance work on pumps which have used special gases or other hazardous substances.
Be sure the inlet gas temperature must be lower than 122 °F.
Technical Specifications
| Model | GWSP40 | GWSP75 | GWSP150 | GWSP300 | GWSP600 | GWSP1000 | ||
| Pumping Speed | 50Hz | l/s | 0.5 | 1.0 | 2.0 | 4.3 | 8.7 | 16.6 |
| m3/h | 1.8 | 3.6 | 7.2 | 15.5 | 31.3 | 59.8 | ||
| cfm | 1.1 | 2.1 | 4.3 | 9.3 | 18.7 | 35.8 | ||
| 60Hz | l/s | 0.6 | 1.2 | 2.4 | 5.1 | 10.4 | 20.0 | |
| m3/h | 2.2 | 4.3 | 8.6 | 18.3 | 37.4 | 71.6 | ||
| cfm | 1.3 | 2.5 | 5.1 | 10.9 | 22.3 | 42.8 | ||
| Ultimate Pressure | Torr | ≤1.1*10-1 | ≤6.0*10-2 | ≤4.5*10-2 | ≤1.9*10-2 | ≤7.5*10-3 | ≤7.5*10-3 | |
| psi | ≤2.2*10-3 | ≤1.2*10-3 | ≤9.0*10-4 | ≤3.8*10-4 | ≤1.5*10-4 | ≤1.5*10-4 | ||
| Pa | ≤15 | ≤8 | ≤6 | ≤2.6 | ≤1 | ≤1 | ||
| mbar | ≤1.5*10-1 | ≤8.0*10-2 | ≤6.0*10-2 | ≤2.6*10-2 | ≤1.0*10-2 | ≤1.0*10-2 | ||
| Noise Level | dB(A) | ≤54 | ≤57 | ≤57 | ≤60 | ≤61 | ≤65 | |
| Leakage | mbar·l/s | 1*10-7 | ||||||
| Max. Inlet/Exhaust Pressure | MPa | 0.1 / 0.13 | ||||||
| Ambient Operation Temp. | ºF | 41~104 | ||||||
| Motor 1 phase | Power | kW | 0.25 | 0.55 | 0.55 | 0.55 | 0.75 | -- |
| Voltage | V | 110~115 (60Hz),200~230 (50Hz) | -- | |||||
| Speed | rpm | 1425(50Hz),1725(60Hz) | -- | |||||
| Plug | North America, Europe, UK/Ireland, India | -- | ||||||
| Motor 3 phase | Power | kW | -- | 0.55 | 0.55 | 0.55 | 0.75 | 1.5 |
| Voltage | V | -- | 200~230 or 380~415 (50Hz),200~230 or 460 (60Hz) | |||||
| Speed | rpm | -- | 1425 (50Hz),1725 (60Hz) | |||||
| Inlet/Exhaust Flange | KF25/KF16 | KF40/KF16 | KF40/KF16*2 | |||||
| Dimensions | 1 phase | mm | 326*212*253 | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | -- |
| 3 phase | mm | -- | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | 576*450*402 | |
| Net Weight | 1 phase | kg | 15 | 21 | 22 | 29 | 36 | -- |
| 3 phase | kg | -- | 20 | 21 | 28 | 31 | 54 | |
| Cooling Type | Air cooled | |||||||
| Others | With air flush | |||||||
Features & Benefits
No oil clean vacuum.
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup.
Pumping speed covers 3~60 m3 /h, limited vacuum level 1~8 Pa
Suitable for all type of power supply around the world.
110/220/380/460V, 50/60Hz for choose
Low vibration, low noise.
57~65 dB(A), smooth operation
High efficiency, ease of maintenance.
No water cooled, no oil lubricated, no daily maintenance
Quality Control
CMM inspection system assures
fixed tolarance on dimension&shape
Pump Testing
Applications
Semiconductor industryindustry.stry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry.
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry.
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing.
Vacuum gas substitution.
Vacuum equipment.
Oil free ultrahigh vacuum unit.
Oil free vacuum unit.
GEOWELL VACUUM CO.,LTD. is a HI-TECH enterprise in China dedicating in manufacturing, research and development, marketing of oil free scroll vacuum pumps and vacuum compressors since 2002. GEOWELL has been providing users and partners with premium quality products that are efficient and dependable, GEOWELL believe the integration of high performance and high reliability product and service will bring the highest value to both our customers and ourselves.
FAQ
Q: How long can I get the feedback after we sent the inquiry?
A: We will reply you within 12 hours in working day.
Q: Are you direct manufacturer?
A: Yes, we are direct manufacturer with factory and international department; we manufacture and sell all our products by ourselves.
Q: When can you delivery the product to us?
A: Since we are a factory with large warehouse, we have abundant products in store, so we can delivery within 7 days after get your deposit.
Q: Can I add logo to the products?
A: Of course, but we usually have quantity requirement. You can contact with us for details.
Q: How to guarantee the quality and after sales service of your products?
A: We conduct strict detection during production from raw material come in to product delivering shipment. Every product must go through 4 steps inspection from casting, machining, assembling, and performance testing within our factory before shipment, also intact packaging test are insured.
Q: What is your warranty term?
A: There is a 12 months warranty for our export products from the date of shipment. If warranty has run out, our customer should pay for the replacement part.
Q: Is the sample available?
A: Yes, usually we send our samples by Fedex, DHL, TNT, UPS, EMS, SF, Depon, it will take around 3 to 4 days for our customer receive them, but customer will charge all cost related to the samples, such as sample cost and air freight. We will refund our customer the sample cost after receiving the order.
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| After-sales Service: | Yes |
|---|---|
| Warranty: | 1 Years |
| Oil or Not: | Oil Free |
| Structure: | Scroll Pump |
| Exhauster Method: | a Pair of Vortex Plates |
| Vacuum Degree: | Low Vacuum |
| Customization: |
Available
|
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Can scroll vacuum pumps be used in semiconductor manufacturing and research?
Yes, scroll vacuum pumps can be used in semiconductor manufacturing and research. Here's a detailed explanation:
Scroll vacuum pumps are widely utilized in various applications within the semiconductor industry, including both manufacturing processes and research activities. These pumps offer several advantages that make them suitable for semiconductor-related applications:
1. Clean and Oil-Free Operation:
Scroll vacuum pumps are available in oil-free versions, making them well-suited for semiconductor manufacturing and research environments that require a high level of cleanliness. Oil-free operation eliminates the risk of oil contamination, which is crucial in preventing particles or residues that could adversely affect semiconductor device fabrication or research experiments.
2. High Reliability and Uptime:
Scroll vacuum pumps are known for their reliable performance and minimal maintenance requirements. This is particularly important in semiconductor manufacturing, where continuous operation and high uptime are critical for maximizing productivity. The robust design and minimal wear parts of scroll pumps contribute to their long-term reliability and reduced downtime.
3. Low Vibration and Noise:
Scroll vacuum pumps operate with low vibration levels, which is advantageous in semiconductor manufacturing and research settings. Excessive vibrations can disrupt delicate semiconductor fabrication processes or interfere with sensitive research measurements. Additionally, scroll pumps are designed to operate quietly, contributing to a more comfortable and productive working environment.
4. Good Pumping Speed and Ultimate Vacuum:
Scroll vacuum pumps offer efficient pumping speeds, enabling rapid evacuation of process chambers or research apparatus. They can achieve high vacuum levels, which are necessary for various semiconductor manufacturing and research applications, such as thin film deposition, plasma etching, or surface analysis techniques.
5. Compact and Space-Saving:
Scroll vacuum pumps have a compact design and a smaller footprint compared to some other types of vacuum pumps. This is beneficial in semiconductor manufacturing facilities or research laboratories where space is often limited. The compact size of scroll pumps allows for easier integration into existing systems or setups.
6. Compatibility with Semiconductor Processes:
Scroll vacuum pumps are compatible with a wide range of semiconductor manufacturing processes, including vacuum deposition, etching, ion implantation, and thermal processing. They can handle various gases, vapors, and byproducts encountered in these processes, contributing to their versatility.
It is important to consult the manufacturer's specifications and guidelines to ensure that the specific scroll vacuum pump model is suitable for the semiconductor manufacturing or research requirements. Manufacturers can provide information on the pump's performance characteristics, materials compatibility, and any additional features or considerations specific to semiconductor applications.
By utilizing scroll vacuum pumps in semiconductor manufacturing and research, companies and researchers can benefit from their clean operation, reliability, high vacuum performance, and compatibility with a wide range of processes. These pumps play a vital role in enabling the production of high-quality semiconductor devices and supporting cutting-edge research in the semiconductor field.
Can scroll vacuum pumps be used in laboratory applications?
Yes, scroll vacuum pumps can be used in laboratory applications. Here's a detailed explanation:
Scroll vacuum pumps offer several features and advantages that make them suitable for various laboratory applications:
1. Oil-Free Operation:
Many laboratory applications require a clean and oil-free vacuum environment to maintain the integrity of samples, prevent contamination, and ensure accurate results. Scroll vacuum pumps are available in oil-free versions, eliminating the risk of oil vapor or particles contaminating the vacuum system and samples.
2. Low Vibration and Noise:
In laboratory settings where precision and sensitive measurements are crucial, low vibration and noise levels are important considerations. Scroll vacuum pumps operate with minimal vibration and produce less noise compared to some other types of vacuum pumps, making them suitable for laboratory environments.
3. Compact and Space-Efficient:
Laboratories often have limited space, and equipment that is compact and space-efficient is desirable. Scroll vacuum pumps are relatively compact in size and can be easily integrated into laboratory setups without occupying excessive space.
4. Ease of Use:
Scroll vacuum pumps are known for their user-friendly nature. They typically have simple operating procedures, require minimal adjustments or tuning, and are easy to install and operate. This is advantageous in laboratory settings where researchers and technicians may need to work with multiple instruments simultaneously.
5. Versatile Applications:
Scroll vacuum pumps find applications in a wide range of laboratory processes, including:
- Vacuum filtration
- Rotary evaporation
- Freeze drying
- Glove box systems
- Vacuum ovens
- Vacuum distillation
- Vacuum degassing
- Mass spectrometry
- Electron microscopy
- Gas chromatography
- and many more.
It's important to note that the suitability of a scroll vacuum pump for a specific laboratory application depends on the desired vacuum level, required pumping speed, compatibility with the gases or vapors being handled, and any additional requirements specific to the experimental or analytical techniques being employed.
Before selecting a scroll vacuum pump for laboratory use, it is advisable to consult the manufacturer's specifications and guidelines to ensure that the pump meets the specific requirements of the intended application.
What is the noise level produced by scroll vacuum pumps during operation?
The noise level produced by scroll vacuum pumps during operation is typically low. Here's a detailed explanation:
1. Quiet Operation:
Scroll vacuum pumps are known for their quiet operation compared to other types of pumps. The absence of reciprocating parts, such as pistons or vanes, which generate noise through mechanical contact, contributes to their low noise levels. Scroll pumps operate with a smooth and continuous rotary motion, resulting in reduced noise production.
2. Noise Measurements:
The noise level of a scroll vacuum pump is measured in decibels (dB). The specific noise level can vary depending on factors such as the pump model, size, and operating conditions. However, most scroll vacuum pumps produce noise levels in the range of 50 dB to 70 dB.
3. Noise Reduction:
Manufacturers of scroll vacuum pumps often incorporate noise reduction features and technologies to further minimize noise levels. These may include vibration isolation mounts, sound-dampening materials, and optimized airflow designs. These measures help to attenuate noise and ensure quieter operation.
4. Application Considerations:
The noise level requirements may vary depending on the specific application. In some sensitive environments, such as laboratories, research facilities, or medical settings, a low-noise environment is essential to maintain concentration, precision, or patient comfort. Scroll vacuum pumps, with their inherently quiet operation, are well-suited for such applications.
5. Noise Control:
In cases where further noise reduction is necessary, additional noise control measures can be implemented. These may include enclosing the pump in a soundproof housing or utilizing acoustic insulation materials to further dampen the noise. It's important to consider the specific requirements of the application and consult the manufacturer or a noise control expert for guidance on implementing appropriate noise reduction strategies.
In summary, scroll vacuum pumps are known for their quiet operation, typically producing noise levels in the range of 50 dB to 70 dB. Their low noise levels make them suitable for environments where a low-noise working environment is desired, such as laboratories, research facilities, and medical settings. Additionally, manufacturers may incorporate noise reduction features to further minimize noise levels. Overall, scroll vacuum pumps offer a favorable noise profile for various applications.
editor by Dream 2024-04-22