Product Description
Product Description
GWSP Oil free Scroll Vacuum Pump
Working principle:
GWSP oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly,and exhaust valve assembly.Two spiral cylinders, 1 offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of different sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.
Basic informations:
1) Model: GWSP600 Oil free scroll vacuum pump
2) Ultimate vacuum pressure: 1 Pa/0.01 mbar (abs.)
3) Max suction capacity: 50Hz-8.7L/s 60Hz-10.4L/s
Safety Precautions:
The GWSP series oil free scroll vacuum pumps are suitable for clean processes only.
Do not pump toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles.GEOWELL will not perform maintenance work on pumps which have used special gases or other hazardous substances.
Be sure the inlet gas temperature must be lower than 122 °F.
Technical Specifications
| Model | GWSP40 | GWSP75 | GWSP150 | GWSP300 | GWSP600 | GWSP1000 | ||
| Pumping Speed | 50Hz | l/s | 0.5 | 1.0 | 2.0 | 4.3 | 8.7 | 16.6 |
| m3/h | 1.8 | 3.6 | 7.2 | 15.5 | 31.3 | 59.8 | ||
| cfm | 1.1 | 2.1 | 4.3 | 9.3 | 18.7 | 35.8 | ||
| 60Hz | l/s | 0.6 | 1.2 | 2.4 | 5.1 | 10.4 | 20.0 | |
| m3/h | 2.2 | 4.3 | 8.6 | 18.3 | 37.4 | 71.6 | ||
| cfm | 1.3 | 2.5 | 5.1 | 10.9 | 22.3 | 42.8 | ||
| Ultimate Pressure | Torr | ≤1.1*10-1 | ≤6.0*10-2 | ≤4.5*10-2 | ≤1.9*10-2 | ≤7.5*10-3 | ≤7.5*10-3 | |
| psi | ≤2.2*10-3 | ≤1.2*10-3 | ≤9.0*10-4 | ≤3.8*10-4 | ≤1.5*10-4 | ≤1.5*10-4 | ||
| Pa | ≤15 | ≤8 | ≤6 | ≤2.6 | ≤1 | ≤1 | ||
| mbar | ≤1.5*10-1 | ≤8.0*10-2 | ≤6.0*10-2 | ≤2.6*10-2 | ≤1.0*10-2 | ≤1.0*10-2 | ||
| Noise Level | dB(A) | ≤54 | ≤57 | ≤57 | ≤60 | ≤61 | ≤65 | |
| Leakage | mbar·l/s | 1*10-7 | ||||||
| Max. Inlet/Exhaust Pressure | MPa | 0.1 / 0.13 | ||||||
| Ambient Operation Temp. | ºF | 41~104 | ||||||
| Motor 1 phase | Power | kW | 0.25 | 0.55 | 0.55 | 0.55 | 0.75 | -- |
| Voltage | V | 110~115 (60Hz),200~230 (50Hz) | -- | |||||
| Speed | rpm | 1425(50Hz),1725(60Hz) | -- | |||||
| Plug | North America, Europe, UK/Ireland, India | -- | ||||||
| Motor 3 phase | Power | kW | -- | 0.55 | 0.55 | 0.55 | 0.75 | 1.5 |
| Voltage | V | -- | 200~230 or 380~415 (50Hz),200~230 or 460 (60Hz) | |||||
| Speed | rpm | -- | 1425 (50Hz),1725 (60Hz) | |||||
| Inlet/Exhaust Flange | KF25/KF16 | KF40/KF16 | KF40/KF16*2 | |||||
| Dimensions | 1 phase | mm | 326*212*253 | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | -- |
| 3 phase | mm | -- | 450*260*296 | 455*260*296 | 493*297*334 | 538*315*348 | 576*450*402 | |
| Net Weight | 1 phase | kg | 15 | 21 | 22 | 29 | 36 | -- |
| 3 phase | kg | -- | 20 | 21 | 28 | 31 | 54 | |
| Cooling Type | Air cooled | |||||||
| Others | With air flush | |||||||
Features & Benefits
No oil clean vacuum.
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup.
Pumping speed covers 3~60 m3 /h, limited vacuum level 1~8 Pa
Suitable for all type of power supply around the world.
110/220/380/460V, 50/60Hz for choose
Low vibration, low noise.
57~65 dB(A), smooth operation
High efficiency, ease of maintenance.
No water cooled, no oil lubricated, no daily maintenance
Quality Control
CMM inspection system assures
fixed tolarance on dimension&shape
Pump Testing
Applications
Semiconductor industryindustry.stry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry.
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry.
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing.
Vacuum gas substitution.
Vacuum equipment.
Oil free ultrahigh vacuum unit.
Oil free vacuum unit.
GEOWELL VACUUM CO.,LTD. is a HI-TECH enterprise in China dedicating in manufacturing, research and development, marketing of oil free scroll vacuum pumps and vacuum compressors since 2002. GEOWELL has been providing users and partners with premium quality products that are efficient and dependable, GEOWELL believe the integration of high performance and high reliability product and service will bring the highest value to both our customers and ourselves.
FAQ
Q: How long can I get the feedback after we sent the inquiry?
A: We will reply you within 12 hours in working day.
Q: Are you direct manufacturer?
A: Yes, we are direct manufacturer with factory and international department; we manufacture and sell all our products by ourselves.
Q: When can you delivery the product to us?
A: Since we are a factory with large warehouse, we have abundant products in store, so we can delivery within 7 days after get your deposit.
Q: Can I add logo to the products?
A: Of course, but we usually have quantity requirement. You can contact with us for details.
Q: How to guarantee the quality and after sales service of your products?
A: We conduct strict detection during production from raw material come in to product delivering shipment. Every product must go through 4 steps inspection from casting, machining, assembling, and performance testing within our factory before shipment, also intact packaging test are insured.
Q: What is your warranty term?
A: There is a 12 months warranty for our export products from the date of shipment. If warranty has run out, our customer should pay for the replacement part.
Q: Is the sample available?
A: Yes, usually we send our samples by Fedex, DHL, TNT, UPS, EMS, SF, Depon, it will take around 3 to 4 days for our customer receive them, but customer will charge all cost related to the samples, such as sample cost and air freight. We will refund our customer the sample cost after receiving the order.
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| After-sales Service: | Yes |
|---|---|
| Warranty: | 1 Years |
| Oil or Not: | Oil Free |
| Structure: | Scroll Pump |
| Exhauster Method: | a Pair of Vortex Plates |
| Vacuum Degree: | Low Vacuum |
| Customization: |
Available
|
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Can scroll vacuum pumps be used in semiconductor manufacturing and research?
Yes, scroll vacuum pumps can be used in semiconductor manufacturing and research. Here's a detailed explanation:
Scroll vacuum pumps are widely utilized in various applications within the semiconductor industry, including both manufacturing processes and research activities. These pumps offer several advantages that make them suitable for semiconductor-related applications:
1. Clean and Oil-Free Operation:
Scroll vacuum pumps are available in oil-free versions, making them well-suited for semiconductor manufacturing and research environments that require a high level of cleanliness. Oil-free operation eliminates the risk of oil contamination, which is crucial in preventing particles or residues that could adversely affect semiconductor device fabrication or research experiments.
2. High Reliability and Uptime:
Scroll vacuum pumps are known for their reliable performance and minimal maintenance requirements. This is particularly important in semiconductor manufacturing, where continuous operation and high uptime are critical for maximizing productivity. The robust design and minimal wear parts of scroll pumps contribute to their long-term reliability and reduced downtime.
3. Low Vibration and Noise:
Scroll vacuum pumps operate with low vibration levels, which is advantageous in semiconductor manufacturing and research settings. Excessive vibrations can disrupt delicate semiconductor fabrication processes or interfere with sensitive research measurements. Additionally, scroll pumps are designed to operate quietly, contributing to a more comfortable and productive working environment.
4. Good Pumping Speed and Ultimate Vacuum:
Scroll vacuum pumps offer efficient pumping speeds, enabling rapid evacuation of process chambers or research apparatus. They can achieve high vacuum levels, which are necessary for various semiconductor manufacturing and research applications, such as thin film deposition, plasma etching, or surface analysis techniques.
5. Compact and Space-Saving:
Scroll vacuum pumps have a compact design and a smaller footprint compared to some other types of vacuum pumps. This is beneficial in semiconductor manufacturing facilities or research laboratories where space is often limited. The compact size of scroll pumps allows for easier integration into existing systems or setups.
6. Compatibility with Semiconductor Processes:
Scroll vacuum pumps are compatible with a wide range of semiconductor manufacturing processes, including vacuum deposition, etching, ion implantation, and thermal processing. They can handle various gases, vapors, and byproducts encountered in these processes, contributing to their versatility.
It is important to consult the manufacturer's specifications and guidelines to ensure that the specific scroll vacuum pump model is suitable for the semiconductor manufacturing or research requirements. Manufacturers can provide information on the pump's performance characteristics, materials compatibility, and any additional features or considerations specific to semiconductor applications.
By utilizing scroll vacuum pumps in semiconductor manufacturing and research, companies and researchers can benefit from their clean operation, reliability, high vacuum performance, and compatibility with a wide range of processes. These pumps play a vital role in enabling the production of high-quality semiconductor devices and supporting cutting-edge research in the semiconductor field.
Can scroll vacuum pumps handle both dry and wet processes?
Yes, scroll vacuum pumps can handle both dry and wet processes. Here's a detailed explanation:
Scroll vacuum pumps are versatile and can be used in a variety of applications, including both dry and wet processes. The suitability of a scroll vacuum pump for a specific process depends on several factors:
Dry Processes:
In dry processes, the scroll vacuum pump operates in a clean and dry environment, handling gases or vapors without any significant liquid content. Dry processes are common in applications such as vacuum filtration, vacuum drying, and vacuum distillation.
Scroll vacuum pumps are well-suited for dry processes due to the following reasons:
- Oil-Free Operation: Scroll vacuum pumps are available in oil-free versions, which are ideal for maintaining a clean and contamination-free vacuum environment in dry processes. Oil-free operation eliminates the risk of oil vapor or particles contaminating the process and the end products.
- Minimal Internal Leakage: Scroll vacuum pumps have a relatively low internal leakage rate, helping to maintain the desired vacuum level in dry processes. The scroll pump design with its dynamically sealed orbiting and fixed scrolls helps minimize leakage, ensuring efficient and reliable operation.
Wet Processes:
In wet processes, the scroll vacuum pump comes into contact with liquids or handles gases/vapors that have a significant liquid content. Wet processes can include applications such as vacuum filtration with liquid samples, wet chemistry techniques, or processes involving liquid extraction.
For wet processes, additional considerations may be necessary:
- Liquid Compatibility: The scroll vacuum pump should be compatible with the liquids or liquid-containing gases/vapors being handled in wet processes. Certain corrosive or chemically reactive liquids may require special pump materials or additional precautions to ensure compatibility.
- Liquid Handling Capacity: The scroll vacuum pump should have adequate liquid handling capacity to handle the liquid or liquid-containing gases/vapors encountered in wet processes. Some scroll vacuum pump models may offer specific features or accessories, such as liquid traps or separators, to facilitate liquid handling and prevent liquid carryover into the pump.
It's important to consult the manufacturer's specifications and guidelines to ensure that the scroll vacuum pump is suitable for the specific dry or wet process requirements. The manufacturer can provide information on the pump's compatibility with different gases, vapors, and liquids, as well as any additional considerations or accessories needed for wet processes.
By selecting the appropriate scroll vacuum pump and following the recommended operating procedures, both dry and wet processes can be effectively handled, providing reliable and efficient vacuum performance.
What are the primary advantages of using scroll vacuum pumps?
Scroll vacuum pumps offer several advantages that make them a preferred choice in various applications. Here's a detailed explanation of the primary advantages of using scroll vacuum pumps:
1. Oil-Free Operation:
One of the significant advantages of scroll vacuum pumps is their oil-free operation. Unlike some other types of vacuum pumps, scroll pumps do not require oil for lubrication or sealing purposes. The interlocking scrolls create a sealing mechanism without the need for any lubricating medium. This eliminates the risk of oil contamination in sensitive applications, such as semiconductor manufacturing or laboratory environments, where oil-free conditions are crucial. It also reduces maintenance requirements, as there is no need for oil changes or monitoring oil levels.
2. High Efficiency:
Scroll vacuum pumps are known for their high efficiency. The continuous spiral motion of the scrolls ensures smooth operation and minimizes energy losses. The absence of frictional parts, such as piston rings or vanes, reduces internal losses and improves overall efficiency. Scroll pumps can achieve high pumping speeds and are capable of reaching deep vacuum levels. Their efficiency makes them suitable for applications where fast evacuation or high vacuum levels are required, such as in analytical instruments or in the production of electronic components.
3. Low Noise and Vibration:
Scroll vacuum pumps operate quietly and generate minimal vibrations. The spiral motion of the scrolls results in a smooth and continuous operation, reducing noise levels compared to other types of pumps. The absence of reciprocating parts, such as pistons or vanes, further contributes to the low noise and vibration levels. This characteristic is particularly advantageous in applications where noise reduction and minimal vibration are essential, such as in medical environments, laboratories, or research facilities.
4. Compact Size:
Scroll vacuum pumps are compact in size, making them suitable for applications where space is limited. Their small footprint allows for easy integration into existing systems or equipment. The compact size is especially beneficial in portable or handheld devices, where size and weight considerations are crucial. The compact design of scroll pumps also simplifies installation and maintenance, as they require less space and can be easily maneuvered or relocated as needed.
5. Minimal Maintenance:
Scroll vacuum pumps require minimal maintenance compared to some other vacuum pump types. The absence of oil eliminates the need for oil changes or monitoring oil levels. Scroll pumps typically have a simple design with fewer moving parts, reducing the risk of mechanical failure and the need for frequent repairs. This results in lower maintenance costs and less downtime, contributing to increased productivity and efficiency in various applications.
6. Clean and Contamination-Free:
Scroll vacuum pumps offer clean and contamination-free operation. The absence of oil means there is no risk of oil contamination in the evacuated environment, making them suitable for applications where maintaining a clean and pure atmosphere is critical. This is particularly important in industries such as semiconductor manufacturing, pharmaceuticals, or food processing, where even the slightest contamination can have significant consequences. The clean operation of scroll pumps ensures the integrity and quality of the final products.
7. Reliable Performance:
Scroll vacuum pumps are known for their reliable performance. The simplicity of their design, with fewer moving parts, reduces the risk of mechanical failure and improves overall reliability. Scroll pumps can operate continuously for extended periods without significant performance degradation. Their reliable performance makes them suitable for critical applications where consistent and dependable vacuum generation is essential.
In summary, the primary advantages of using scroll vacuum pumps include oil-free operation, high efficiency, low noise and vibration levels, compact size, minimal maintenance requirements, clean and contamination-free operation, and reliable performance. These advantages make scroll vacuum pumps a preferred choice in various industries and applications, ranging from semiconductor manufacturing and laboratories to medical equipment and research facilities.
editor by Dream 2024-04-26