Rse180 Plasma Cleaning Used Dry Screw Vacuum Pumps

Rse180 Plasma Cleaning Employed Dry Screw Vacuum Pumps

Product attributes:
one. RSE sequence dry screw vacuum pump is one phase compression, simple structure.Partition plate in the cavity, the exhaust path is straightforward and quick, and reactant gas is effortlessly discharged.

2. The substantial strain stop of the fatigued temprature deposition is effortlessly fixed, and helical rotor with sedment taken out.

3. The case of a solitary-phase exhaust, no modify in the inner volume of the ongoing procedure at atmospheric stress, and a locking phenomenon does not occur during procedure. For symmetrical rotation composition, vibration price is much less than 10u.

four. Low operation sounds.

5. The spiral composition of the solitary section, the helical part of the routine maintenance is extremely easy. With corrosion-resistant supplies, only the alternative of the sealed lessons of the usage products can help save on maintenance costs.

CZPT application:
Extensively utilised in vacuum coating, oven, heat therapy, pharmaceutical, chemical apps, semiconductor, LED and photo voltaic cell industry, and so on..

CZPT info Device RSE180
Pumping Pace mthree/h 150
Supreme Vacuum mbar ≤1.0×10-2
Motor Energy Kw four.forty seven
Sounds Amount dB(A) <70
Inlet/Outlet Flange NW 50/40
Fat Kg 320
CZPT H2o Strain kg/cm2 two.-four.
Flow L/min three-seven
Temp ºC fifteen-thirty
Link " RC three/eight"
N2 Stress Mpa .fifteen-.two
Dilute Movement L/min -60
CZPT Circulation L/min -20
Relationship " Swagelok1/4"
Manage Panel " SEMI E73-5719
Max Leak Charge mbar.l/s 1.0x10-five

Rse180 Plasma Cleaning Used Dry Screw Vacuum Pumps