Turbo Molecular Vacuum pump
Description:
CY-GZK110 series molecular pump device is composed of turbo molecular pump, previous mechanical pump partition bleed valve, former pipeline, molecular pump energy, and management program. It is a ultra high vacuum get system.
Features:
Straightforward set up and operation, reliable functionality and can be commonly used for area examination, accelerator engineering, semiconductor equipment, plasma technologies, electrical vacuum device producing and vacuum technologies in different fields.
Specification:
| Design no. | CYY-GZK110 | ||
| Inlet flange | DN100LF | DN100CF | |
| Pump pace L/S( in air) | >110 | ||
| Compression ratio N2 H2 |
>108 5×102 |
||
| Constrained vacuum(Pa) | 6×10-six | 6×10-seven | |
| Outlet flange | KF25 | ||
| Enter voltage frequency(V/Hz) | 220±20/fifty | ||
| CZPT temperature(ºC) | ~40 | ||
| Former pump design | RVP-four | ||
| Begin time(min) | <3 | ||
| CZPT velocity(rpm) | 42,300 | ||
| CZPT variety | Water cooling or pressured air cooling | ||
| Gross excess weight | 65kg | ||
| Dimension | five hundred(L)×510(W)×685(H) mm | ||
