High Vacuum Molecular Pump

The turbo molecular pump is a mechanical vacuum pump with a rotor produced of a quickly rotating turbine blade&comma helical groove&comma or a mix of the two&time period The fuel molecules enter the turbo molecular pump and collide with the surface of the rotors making kinetic energy causing the fuel molecules to transfer towards the turbomolecular pump exhaust&period

The pumps offer you entire magnetic levitation rotor&comma which provides a thoroughly clean&comma dependable vacuum for today's semiconductor and solar industries&period It attributes a five axis magnetic bearing and 50 percent rack controller necessitating no tuning or battery backup&comma substantial compression&comma and corrosion resistant&period of time

Design FF-two hundred&sol1200C FF-two hundred&sol1300
Capacity&lparl&sols&rpar 1200 1300
H2 Compression Ratio 6× ten 3 6× ten three
N2 Compression Ratio 1× ten 9 1× 10 nine
Supreme Force&lparPa&rpar ≤ 1× ten -6 DN200 LF
≤ 1× 10 -seven DN200 CF
≤ 6× ten -6 DN200 LF
≤ 6× ten -7 DN200 CF
Rotation Speed&lparRPM&rpar 27000 24000
Operate up time&lparmin&rpar < 6 < 6
Outlet Flange KF40&lparDN40 ISO-KF&rpar KF40&lparDN40 ISO-KF&rpar
Inlet Flange LF200&lparDN200 ISO-K&rpar                        LF160&lparDN160 ISO-K&rpar                       
Bearing Ceramic bearing Ceramic bearing
Backing pump&lparl&sols&rpar 15 15
CZPT h2o&lparº C&rpar ≤ 25 ≤ 25
Heating T&lparº C&rpar ≤ 100 ≤ one hundred
Ambient T&lparº C&rpar 5~40 five~forty
Oil loaded&lparml&rpar a hundred and fifty Grease lubricated
Set up CZPTation vertical&pm 5° any
Bodyweight&lparkg&rpar 39 29

High Vacuum Molecular Pump