The turbo molecular pump is a mechanical vacuum pump with a rotor produced of a quickly rotating turbine blade&comma helical groove&comma or a mix of the two&time period The fuel molecules enter the turbo molecular pump and collide with the surface of the rotors making kinetic energy causing the fuel molecules to transfer towards the turbomolecular pump exhaust&period
The pumps offer you entire magnetic levitation rotor&comma which provides a thoroughly clean&comma dependable vacuum for today's semiconductor and solar industries&period It attributes a five axis magnetic bearing and 50 percent rack controller necessitating no tuning or battery backup&comma substantial compression&comma and corrosion resistant&period of time
Design | FF-two hundred&sol1200C | FF-two hundred&sol1300 |
Capacity&lparl&sols&rpar | 1200 | 1300 |
H2 Compression Ratio | 6× ten 3 | 6× ten three |
N2 Compression Ratio | 1× ten 9 | 1× 10 nine |
Supreme Force&lparPa&rpar | ≤ 1× ten -6 DN200 LF ≤ 1× 10 -seven DN200 CF |
≤ 6× ten -6 DN200 LF ≤ 6× ten -7 DN200 CF |
Rotation Speed&lparRPM&rpar | 27000 | 24000 |
Operate up time&lparmin&rpar | < 6 | < 6 |
Outlet Flange | KF40&lparDN40 ISO-KF&rpar | KF40&lparDN40 ISO-KF&rpar |
Inlet Flange | LF200&lparDN200 ISO-K&rpar | LF160&lparDN160 ISO-K&rpar |
Bearing | Ceramic bearing | Ceramic bearing |
Backing pump&lparl&sols&rpar | 15 | 15 |
CZPT h2o&lparº C&rpar | ≤ 25 | ≤ 25 |
Heating T&lparº C&rpar | ≤ 100 | ≤ one hundred |
Ambient T&lparº C&rpar | 5~40 | five~forty |
Oil loaded&lparml&rpar | a hundred and fifty | Grease lubricated |
Set up CZPTation | vertical&pm 5° | any |
Bodyweight&lparkg&rpar | 39 | 29 |