Product Description

Dry Scroll Vacuum Pump RGP3
 

Product Description

The scroll vacuum pump is a new generation of oil-free mechanical pump, which has the advantages of simple structure, good sealing performance and high ultimate vacuum. As a high-tech product, the scroll dry vacuum pump has a very high technical content in design and production. It has obvious features such as low operating cost, long working life, high reliability and low noise in application. It has unparalleled advantages in oil cleaning applications and are therefore highly regarded by the market. The RGP series scroll dry pump is a vortex dry pump with advantages of excellent performance and competitive price , which is developed by CHINAMFG Vacuum for the downstream application of domestic and foreign markets.

Product Parameters

 

Product Model 50/60Hz RGP3
Pumping Speed 50Hz 12m³/H
60Hz 14.4m³/H
Ultimate Pressure mbar 0.008
Inlet Diameter   NW25
Voltage 50Hz 100-240
60Hz 100-240
Motor Power kW 0.4
Noise Level dB 54
Net Weight kg 28

 

Detailed Photos

 

Installation Instructions

 

Certifications

Company Profile

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Oil or Not: Oil Free
Structure: Scroll Vacuum Pump
Exhauster Method: Scroll Vacuum Pump
Vacuum Degree: High Vacuum
Work Function: Maintain the Pump
Working Conditions: Dry
Samples:
US$ 385/Set
1 Set(Min.Order)

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Customization:
Available

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scroll vane pump

Can scroll vacuum pumps be used in semiconductor manufacturing and research?

Yes, scroll vacuum pumps can be used in semiconductor manufacturing and research. Here's a detailed explanation:

Scroll vacuum pumps are widely utilized in various applications within the semiconductor industry, including both manufacturing processes and research activities. These pumps offer several advantages that make them suitable for semiconductor-related applications:

1. Clean and Oil-Free Operation:

Scroll vacuum pumps are available in oil-free versions, making them well-suited for semiconductor manufacturing and research environments that require a high level of cleanliness. Oil-free operation eliminates the risk of oil contamination, which is crucial in preventing particles or residues that could adversely affect semiconductor device fabrication or research experiments.

2. High Reliability and Uptime:

Scroll vacuum pumps are known for their reliable performance and minimal maintenance requirements. This is particularly important in semiconductor manufacturing, where continuous operation and high uptime are critical for maximizing productivity. The robust design and minimal wear parts of scroll pumps contribute to their long-term reliability and reduced downtime.

3. Low Vibration and Noise:

Scroll vacuum pumps operate with low vibration levels, which is advantageous in semiconductor manufacturing and research settings. Excessive vibrations can disrupt delicate semiconductor fabrication processes or interfere with sensitive research measurements. Additionally, scroll pumps are designed to operate quietly, contributing to a more comfortable and productive working environment.

4. Good Pumping Speed and Ultimate Vacuum:

Scroll vacuum pumps offer efficient pumping speeds, enabling rapid evacuation of process chambers or research apparatus. They can achieve high vacuum levels, which are necessary for various semiconductor manufacturing and research applications, such as thin film deposition, plasma etching, or surface analysis techniques.

5. Compact and Space-Saving:

Scroll vacuum pumps have a compact design and a smaller footprint compared to some other types of vacuum pumps. This is beneficial in semiconductor manufacturing facilities or research laboratories where space is often limited. The compact size of scroll pumps allows for easier integration into existing systems or setups.

6. Compatibility with Semiconductor Processes:

Scroll vacuum pumps are compatible with a wide range of semiconductor manufacturing processes, including vacuum deposition, etching, ion implantation, and thermal processing. They can handle various gases, vapors, and byproducts encountered in these processes, contributing to their versatility.

It is important to consult the manufacturer's specifications and guidelines to ensure that the specific scroll vacuum pump model is suitable for the semiconductor manufacturing or research requirements. Manufacturers can provide information on the pump's performance characteristics, materials compatibility, and any additional features or considerations specific to semiconductor applications.

By utilizing scroll vacuum pumps in semiconductor manufacturing and research, companies and researchers can benefit from their clean operation, reliability, high vacuum performance, and compatibility with a wide range of processes. These pumps play a vital role in enabling the production of high-quality semiconductor devices and supporting cutting-edge research in the semiconductor field.

scroll vane pump

How do scroll vacuum pumps compare to other types of vacuum pumps in terms of performance?

Scroll vacuum pumps offer unique advantages and perform differently compared to other types of vacuum pumps. Here's a detailed comparison of scroll vacuum pumps with other common vacuum pump types:

1. Scroll Vacuum Pumps vs. Rotary Vane Pumps:

a. Oil Contamination: Scroll vacuum pumps operate without oil lubrication, eliminating the risk of oil contamination in the pumped gases or the surrounding environment. In contrast, rotary vane pumps require oil lubrication, which can introduce oil vapor or particles into the vacuum system.

b. Vibration and Noise: Scroll vacuum pumps operate with low vibration levels and produce less noise compared to rotary vane pumps. Rotary vane pumps can generate higher levels of vibration and noise due to the reciprocating motion of the vanes.

c. Ultimate Vacuum: Rotary vane pumps can achieve lower ultimate vacuum levels compared to scroll vacuum pumps. They are capable of reaching vacuum levels in the range of 10-3 to 10-4 millibar (mbar), while scroll vacuum pumps typically achieve vacuum levels in the range of 10-2 to 10-3 mbar.

2. Scroll Vacuum Pumps vs. Turbomolecular Pumps:

a. Pumping Speed: Turbomolecular pumps offer higher pumping speeds compared to scroll vacuum pumps. Turbomolecular pumps can achieve faster evacuation rates, making them suitable for applications that require rapid pumpdown or high gas flow rates.

b. Ultimate Vacuum: Turbomolecular pumps can achieve much lower ultimate vacuum levels compared to scroll vacuum pumps. They are capable of reaching vacuum levels in the range of 10-7 to 10-10 mbar, making them suitable for ultra-high vacuum (UHV) applications.

c. Complexity and Cost: Turbomolecular pumps are more complex and expensive compared to scroll vacuum pumps. They often require additional supporting equipment, such as backing pumps or foreline traps, which can increase the overall system complexity and cost.

3. Scroll Vacuum Pumps vs. Diaphragm Pumps:

a. Contamination Resistance: Scroll vacuum pumps offer better contamination resistance compared to diaphragm pumps. Diaphragm pumps can be prone to contamination when handling corrosive or particulate-laden gases.

b. Ultimate Vacuum: Scroll vacuum pumps can achieve lower ultimate vacuum levels compared to diaphragm pumps. Diaphragm pumps typically reach vacuum levels in the range of 10-2 to 10-3 mbar, similar to scroll pumps, but may have limitations in achieving deeper vacuum levels.

c. Durability: Scroll vacuum pumps are generally more durable and require less maintenance compared to diaphragm pumps. Diaphragm pumps utilize flexible membranes that can wear out over time and may require periodic replacement.

In summary, scroll vacuum pumps offer advantages such as oil-free operation, low vibration and noise levels, and contamination resistance. However, their ultimate vacuum levels may not match those of turbomolecular pumps or rotary vane pumps. The choice of vacuum pump depends on specific application requirements, including the desired vacuum level, pumping speed, contamination sensitivity, and budget constraints.

China Hot selling Dry Oil-Free Scroll Vacuum Pump Use in Semiconductor/Scientific Instrument/Mechanical Equipment/Chemistry/Medical Treatment/Packaging   vacuum pump electricChina Hot selling Dry Oil-Free Scroll Vacuum Pump Use in Semiconductor/Scientific Instrument/Mechanical Equipment/Chemistry/Medical Treatment/Packaging   vacuum pump electric
editor by CX 2024-02-25